Facilities Description

Clean rooms (Class 1000 and Class 100), micro-fabrication, metrology and materials characterization facilities are available at the Center for Integrated Microchemical Systems (CIMS) and Materials Characterization Facility (MCF) at Texas A&M University. Equipments available at CIMS/ MCF (that will be used for the proposed study) includes: spin coater, mask aligner, metal evaporation chamber, wet etch baths, oxidation furnace, plasma etchers (Reactive Ion Etcher or RIE), wire bonders, profilometers, optical microscopes, Atomic Force Microscopes (AFM), Hysitron Nano-Indentors, Scanning Electron Microscope (SEM), mass-spectrometer, ellipsometer, spectro-fluorometers, and X-Ray photo-electron spectrometer (XPS). The Microscopy and Imaging Center (MIC) at Texas A&M University houses several SEM, Transmission Electron Microscopes and Specialized Optical Microscopes. Both facilities (CIMS/MCF and MIC) are available for a nominal fee ($10-$44/hour) for Texas A&M faculty, students and research staff.
In addition, the Physics Department at Texas A&M University houses an Electron Beam Lithography (EBL) system which is available for a nominal charge ($45/ hour) to faculty, research staff and students.
The Supercomputing Center at Texas A&M will be utilized for performing data analyses and developing the numerical models. This facility is available free of charge to enrolled students and faculty. The Center provides access to design (CAD), modeling (FEM, CFD; e.g., Fluent, Gambit, StarCD, Ansys, CFX, Abaqus, Patran, NWChem) and simulation (Matlab, Maple, Mathematica, HSpice, Gaussian, GCG, PDE2D) software
The micro/nano-fabrication processes will also be performed at the NSF-NNIN facility (U.S. National Science Foundation – Nanotechnology Infrastructure Site) located at the University of Texas at Austin.
Additional details about facilities, equipments, and usage rates can be found at the following web sites.

Web Sites

1. Multi-Phase Flows and Heat Transfer Laboratory (managed by Dr. Banerjee)
2. Energy Systems Laboratory (designated research space managed by Dr. Banerjee)

3. Center for Integrated Microchemical Systems (CIMS); Materials Characterization Facility (MCF), Texas &M University (fee based user facility)
 
4. Microscopy and Imaging Center, Texas A&M University (fee based user facility)

5. Supercomputing Center, Texas A&M University (free of charge to faculty and researchers at Texas A&M University)
 
6. NSF-NNIN, University of Texas at Austin (fee based user facility)